Effects of the erosion zone of magnetron sputtering targets on the spatial distribution of structural and electrical properties of transparent conductive Al-doped ZnO polycrystalline films (vol 124, 065304, 2018)

被引：0
|
作者：
Nomoto, Junichi [1 ]
Makino, Hisao [1 ]
Inaba, Katsuhiko [2 ]
Kobayashi, Shintaro [2 ]
Yamamoto, Tetsuya [1 ]
机构：
[1] Kochi Univ Technol, Res Inst, 185 Miyanokuchi, Kochi 7828502, Japan
[2] Rigaku Corp, Xray Res Lab, 3-9-12 Matsubara, Akishima, Tokyo 1968666, Japan
来源：
JOURNAL OF APPLIED PHYSICS | 2019年 / 125卷 / 02期
关键词：
D O I：
10.1063/1.5086316
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页数：1
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