Micromachining of optical fiber using reactive ion etching and its application

被引：2
|
作者：
Kumazaki, H [1 ]
Yamada, Y [1 ]
Oshima, T [1 ]
Inaba, S [1 ]
Hane, K [1 ]
机构：
[1] Gifu Natl Coll Technol, Dept Elect Engn, Gifu, Japan
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS | 2000年
关键词：
D O I：
10.1109/IMNC.2000.872672
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：154 / 155
页数：2
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