Crystalline silicon films by chemical vapor deposition on glass for thin film solar cells

被引:0
|
作者
Bergmann, RB [1 ]
Brendel, R [1 ]
Wolf, M [1 ]
Lolgen, P [1 ]
Werner, JH [1 ]
Krinke, J [1 ]
Strunk, HP [1 ]
机构
[1] MAX PLANCK INST FESTKORPERFORSCH,D-70569 STUTTGART,GERMANY
关键词
D O I
10.1109/PVSC.1996.564021
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
引用
收藏
页码:365 / 370
页数:6
相关论文
共 50 条
  • [21] Crystalline silicon thin film and nanowire solar cells
    Department of Engineering and Design, London South Bank University, 103 Borough Road, London
    SE1 0AA, United Kingdom
    RSC Energy Environ. Ser., 12 (53-88):
  • [22] Pulsed chemical vapor deposition for crystalline aluminum nitride thin films and buffer layers on silicon and silicon carbide
    McLeod, Aaron J.
    Ueda, Scott T.
    Lee, Ping C.
    Spiegelman, Jeff
    Kanjolia, Ravindra
    Moinpour, Mansour
    Woodruff, Jacob
    Kummel, Andrew C.
    THIN SOLID FILMS, 2023, 768
  • [23] Low temperature deposition of crystalline silicon on glass by hot wire chemical vapor deposition
    Chung, Yung-Bin
    Park, Hyung-Ki
    Lee, Dong-Kwon
    Jo, Wook
    Song, Jean-Ho
    Lee, Sang-Hoon
    Hwang, Nong-Moon
    JOURNAL OF CRYSTAL GROWTH, 2011, 327 (01) : 57 - 62
  • [24] THE CHEMICAL VAPOR-DEPOSITION OF SILICON THIN-FILMS
    SCOTT, BA
    ESTES, RD
    BEACH, DB
    SILICON CHEMISTRY, 1988, : 367 - 375
  • [25] High Pressure Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Films and Solar Cells
    He, Rongrui
    Day, Todd D.
    Sparks, Justin R.
    Sullivan, Nichole F.
    Badding, John V.
    ADVANCED MATERIALS, 2016, 28 (28) : 5939 - +
  • [26] Very thin and stable thin-film silicon alloy triple junction solar cells by hot wire chemical vapor deposition
    Veldhuizen, L. W.
    Schropp, R. E. I.
    APPLIED PHYSICS LETTERS, 2016, 109 (09)
  • [27] Optimization of hydrogenated amorphous silicon germanium thin films and solar cells deposited by hot wire chemical vapor deposition
    Veldhuizen, L. W.
    Van der Werf, C. H. M.
    Kuang, Y.
    Bakker, N. J.
    Yun, S. J.
    Schropp, R. E. I.
    THIN SOLID FILMS, 2015, 595 : 226 - 230
  • [28] Textured ZnO thin films for solar cells grown by metalorganic chemical vapor deposition
    Wenas, Wilson W.
    Yamada, Akira
    Konagai, Makoto
    Takahashi, Kiyoshi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1991, 30 (3 B): : 441 - 443
  • [29] Application of hydrosilane-free atmospheric pressure chemical vapor deposition of SiOx films in the manufacture of crystalline silicon solar cells
    Issa, Esmail
    Nagel, Henning
    Bartsch, Jonas
    Glatthaar, Markus
    Raedlein, Edda
    THIN SOLID FILMS, 2020, 713
  • [30] Passivation effect of plasma chemical vapor deposited SiNx on single-crystalline silicon thin-film solar cells
    Yamamoto, Y
    Uraoka, Y
    Fuyuki, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (08): : 5135 - 5139