Development of an optical stylus displacement sensor for surface profiling instruments

被引：11
|
作者：
Fukatsu, H
Yanagi, K
机构：
[1] Tokyo Metropolitan Coll Technol, Shinagawa Ku, Tokyo 1400011, Japan
[2] Nagaoka Univ Technol, Dept Mech Engn, Nagaoka, Niigata 9402188, Japan
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2005年 / 11卷 / 8-10期
关键词：
optical stylus; speckle noise; knife edge; profile method; surface texture;
D O I：
10.1007/s00542-005-0558-9
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The main cause of irrational results from measurements made with optical stylus instruments is speckle noise in the reflected light. To reduce or eliminate speckle noise, we developed a new optical stylus profiling system consisting of a displacement measuring part using a knife-edge and a speckle noise measurement part. Using this new system, we measured profiles of machined materials. The results show that the new system can eliminate speckle noise and can achieve a level of measurement accuracy as high as that of a contact stylus instrument.
引用
收藏
页码：582 / 589
页数：8
相关论文
共 50 条
  • [41] ROUGHNESS MEASUREMENT WITH ELECTRICAL STYLUS INSTRUMENTS .2. NEW APPROACHES AND DEVELOPMENT TRENDS
    VONPUTTKAMER, H
    TECHNISCHES MESSEN, 1983, 50 (06): : 219 - 224
  • [42] RESEARCH AND DEVELOPMENT IN THE FIELD OF ROUGHNESS MEASURING .2. TEST OF STYLUS TIP INSTRUMENTS
    HILLMANN, W
    TECHNISCHES MESSEN, 1980, 47 (06): : 209 - 218
  • [43] Development of a surface plasmon resonance sensor using an optical fiber prepared by electroless displacement gold plating and its application to immunoassay
    Shoji, Atsushi
    Nakajima, Miyu
    Morioka, Kazuhiro
    Fujimori, Eiji
    Umemura, Tomonari
    Yanagida, Akio
    Hemmi, Akihide
    Uchiyama, Katsumi
    Nakajima, Hizuru
    TALANTA, 2022, 240
  • [44] Assessment of surface finish on bulk scattering materials: a comparison between optical laser stylus and mechanical stylus profilometers
    Mattsson, Lars
    Wagberg, Pia
    Precision Engineering, 1993, 15 (03) : 141 - 149
  • [45] ASSESSMENT OF SURFACE FINISH ON BULK SCATTERING MATERIALS - A COMPARISON BETWEEN OPTICAL LASER STYLUS AND MECHANICAL STYLUS PROFILOMETERS
    MATTSON, L
    WAGBERG, P
    PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1993, 15 (03): : 141 - 149
  • [46] Development of high voltage harmonic measuring instruments for distribution systems using optical voltage sensor and current sensor
    Kaneko, Tadamitsu
    Tsuji, Toshinori
    Ohdou, Junya
    Otsubo, Masahisa
    Honda, Chikahisa
    Kubozono, Takaaki
    Ueda, Yoshiyuki
    Oguro, Yoshiaki
    Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 1999, 128 (04): : 84 - 93
  • [47] Development of high voltage harmonic measuring instruments for distribution systems using optical voltage sensor and current sensor
    Kaneko, T
    Tsuji, T
    Ohdou, J
    Otsubo, M
    Honda, C
    Kubozono, T
    Ueda, Y
    Oguro, Y
    ELECTRICAL ENGINEERING IN JAPAN, 1999, 128 (04) : 84 - 93
  • [48] Development of precision stage with magnified displacement system using multi reflection of optical sensor
    Ha, Yang Hyup
    Lee, Sang Min
    Lee, Seung Joon
    Choi, Soo Chang
    Lee, Deug Woo
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2013, 14 (03) : 461 - 466
  • [49] Development of a low-cost optical fibre colour and displacement sensor measuring instrument
    Junus, R
    Ahmed, MB
    Jarmin, R
    Jalil, NA
    Ahmad, A
    ICSE '96 - 1996 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 1996, : 272 - 275
  • [50] Development of precision stage with magnified displacement system using multi reflection of optical sensor
    Yang Hyup Ha
    Sang Min Lee
    Seung Joon Lee
    Soo Chang Choi
    Deug Woo Lee
    International Journal of Precision Engineering and Manufacturing, 2013, 14 : 461 - 466
12345