Development of an optical stylus displacement sensor for surface profiling instruments

被引：11
|
作者：
Fukatsu, H
Yanagi, K
机构：
[1] Tokyo Metropolitan Coll Technol, Shinagawa Ku, Tokyo 1400011, Japan
[2] Nagaoka Univ Technol, Dept Mech Engn, Nagaoka, Niigata 9402188, Japan
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2005年 / 11卷 / 8-10期
关键词：
optical stylus; speckle noise; knife edge; profile method; surface texture;
D O I：
10.1007/s00542-005-0558-9
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The main cause of irrational results from measurements made with optical stylus instruments is speckle noise in the reflected light. To reduce or eliminate speckle noise, we developed a new optical stylus profiling system consisting of a displacement measuring part using a knife-edge and a speckle noise measurement part. Using this new system, we measured profiles of machined materials. The results show that the new system can eliminate speckle noise and can achieve a level of measurement accuracy as high as that of a contact stylus instrument.
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页码：582 / 589
页数：8
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