Lineselective CO2-lasers with variable line-spacing and variable reflectivity silicon gratings

被引:0
|
作者
Schulz, R [1 ]
Collischon, M [1 ]
Brand, H [1 ]
Schmidt, LP [1 ]
机构
[1] Univ Erlangen Nurnberg, Lehrstuhl Hochfrequenztech, D-91058 Erlangen, Germany
来源
XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers Pt 1 and 2 | 2005年 / 5777卷
关键词
CO2-laser; lineselective; grating; Littrow; unstable resonator; silicon; anisotropic etching;
D O I
10.1117/12.611037
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
A lineselective CO2-laser with an unstable resonator is presented. The CO2-laser is realised with an rf-excited slab geometry to get a compact design with high output power. As lineselective element a grating in Littrow mount is used. The gratings are manufactured by anisotropic etching of silicon. The grating has a variable duty cycle to obtain a variable reflectivity. Furthermore, gratings are presented that have focusing properties by a variation of the grating periodicity.
引用
收藏
页码:742 / 745
页数:4
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