Lineselective CO2-lasers with variable line-spacing and variable reflectivity silicon gratings

被引：0

作者：

Schulz, R ^{[1
]}

Collischon, M ^{[1
]}

Brand, H ^{[1
]}

Schmidt, LP ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Lehrstuhl Hochfrequenztech, D-91058 Erlangen, Germany

来源：

XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers Pt 1 and 2 | 2005年 / 5777卷

关键词：

CO2-laser; lineselective; grating; Littrow; unstable resonator; silicon; anisotropic etching;

D O I：

10.1117/12.611037

中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

摘要：

A lineselective CO2-laser with an unstable resonator is presented. The CO2-laser is realised with an rf-excited slab geometry to get a compact design with high output power. As lineselective element a grating in Littrow mount is used. The gratings are manufactured by anisotropic etching of silicon. The grating has a variable duty cycle to obtain a variable reflectivity. Furthermore, gratings are presented that have focusing properties by a variation of the grating periodicity.

引用

页码：742 / 745

页数：4

共 37 条

[21] A PRECISION VARIABLE DOUBLE PRISM ATTENUATOR FOR CO2 LASERS
OZEKI, T
SAITO, S
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1969, QE 5 (06) : 331 - &
[22] CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE POWDERS USING PULSED CO2-LASERS
SCHOLZ, M
FUSS, W
KOMPA, KL
ADVANCED MATERIALS, 1993, 5 (01) : 38 - 40
[23] SUITABLE INTRACAVITY OPTICAL MATERIAL FOR THE RELIABLE OFF-LINE CENTER OPERATION OF CW CO2-LASERS
DEV, V
BISWAS, DJ
NUNDY, U
CHATTERJEE, UK
OPTICS COMMUNICATIONS, 1988, 65 (05) : 364 - 366
[24] Towards super-resolution interference microscopy metrology of x-ray variable-line-spacing diffraction gratings: Recent developments
Rochester, Simon
English, Damon
Lacey, Ian
Munechika, Keiko
Yashchuk, Valeriy V.
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS XVII, 2022, 12240
[25] Silicon bolometer and micro variable infrared filter for CO2 measurement
Hara, H
Kishi, N
Iwaoka, H
2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2000, : 139 - 140
[26] LINE-CENTER STABILIZED CO2-LASERS AS SECONDARY FREQUENCY STANDARDS - DETERMINATION OF PRESSURE SHIFTS AND OTHER ERRORS
SOOHOO, KL
FREED, C
THOMAS, JE
HAUS, HA
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1985, 21 (08) : 1159 - 1171
[27] Investigation of beam quality of high power CO2 laser with unstable resonator and variable reflectivity mirror
Galushkin, MG
Yakunin, VP
Samarkin, VV
Zavalova, VY
6TH INTERNATIONAL CONFERENCE ON INDUSTRIAL LASERS AND LASER APPLICATIONS '98, 1999, 3688 : 48 - 53
[28] Investigation of beam quality of high power CO2 laser with unstable resonator and variable reflectivity mirror
Proc SPIE Int Soc Opt Eng, (48-53):
[29] Investigation and optimization of generation performances of CO2 laser with unstable resonator and output variable reflectivity mirror.
Galushkin, MG
Yakunin, VP
Samarkin, VV
Zavalova, VY
GAS, LIQUID, AND FREE-ELECTRON LASERS - LASER OPTICS '98, 1999, 3686 : 10 - 15
[30] 2 NEW OPTICAL DESIGNS FOR SOFT-X-RAY SPECTROMETERS USING VARIABLE-LINE-SPACE GRATINGS
OSBORN, KD
CALLCOTT, TA
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (05): : 3131 - 3136

← 1 2 3 4 →