Lineselective CO2-lasers with variable line-spacing and variable reflectivity silicon gratings

被引:0
|
作者
Schulz, R [1 ]
Collischon, M [1 ]
Brand, H [1 ]
Schmidt, LP [1 ]
机构
[1] Univ Erlangen Nurnberg, Lehrstuhl Hochfrequenztech, D-91058 Erlangen, Germany
来源
XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers Pt 1 and 2 | 2005年 / 5777卷
关键词
CO2-laser; lineselective; grating; Littrow; unstable resonator; silicon; anisotropic etching;
D O I
10.1117/12.611037
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
A lineselective CO2-laser with an unstable resonator is presented. The CO2-laser is realised with an rf-excited slab geometry to get a compact design with high output power. As lineselective element a grating in Littrow mount is used. The gratings are manufactured by anisotropic etching of silicon. The grating has a variable duty cycle to obtain a variable reflectivity. Furthermore, gratings are presented that have focusing properties by a variation of the grating periodicity.
引用
收藏
页码:742 / 745
页数:4
相关论文
共 37 条
  • [1] Design and fabrication of holographic variable line-spacing gratings for position sensor
    Lou Jun
    Fu Shao-Jun
    Xu Xiang-Dong
    He Shi-Ping
    ACTA PHYSICA SINICA, 2006, 55 (12) : 6405 - 6409
  • [2] Lineselective resonators with variable reflectivity gratings (VRG) for slab-laser geometry
    Hocke, R
    Collischon, M
    LASER RESONATORS III, 2000, 3930 : 52 - 61
  • [3] VARIABLE ATTENUATOR FOR TEA CO2-LASERS
    MACPHERSON, RW
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1974, 45 (02): : 316 - 317
  • [4] CO2 slab laser with a Variable Reflectivity Grating (VRG) as lineselective element
    Hocke, R
    XIII INTERNATIONAL SYMPOSIUM ON GAS FLOW AND CHEMICAL LASERS AND HIGH-POWER LASER CONFERENCE, 2000, 4184 : 427 - 430
  • [5] Lineselective CO2 lasers with apodized Littrow-Gratings
    Hocke, R.
    Brand, H.
    Collischon, M.
    Schwider, J.
    ITG-Fachbericht, 1998, 150 : 393 - 398
  • [6] Q-SWITCHED CO2-LASERS WITH VARIABLE PULSE DELAY
    BURAK, I
    RONN, AM
    SZOKE, A
    GAMSS, LA
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (09): : 1390 - &
  • [7] OXIDATION OF SILICON SURFACES BY CO2-LASERS
    BOYD, IW
    WILSON, JIB
    APPLIED PHYSICS LETTERS, 1982, 41 (02) : 162 - 164
  • [8] LINE-DEPENDENT SATURATION IN CO2-LASERS
    HENNINGSEN, J
    BRADLEY, MP
    APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1993, 56 (06): : 347 - 353
  • [9] Stitching Measurement of Line Density of Variable-Line-Spacing Gratings with Long Trace Profiler
    Wei Huaikun
    Huan Shuhu
    Liu Ying
    Chen Huoyao
    Qiu Keqiang
    Liu Zhengkun
    Hong Yilin
    ACTA OPTICA SINICA, 2023, 43 (03)
  • [10] VARIABLE PULSE-WIDTH GENERATION FOR CO2-LASERS IN 100 PS TO 1 NS RANGE
    MCLELLAN, EJ
    FIGUEIRA, JF
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1978, 68 (04) : 543 - 543