Comparative Analysis of Optical Surface Measuring Systems with a Chirp Calibration Standard

被引：8
|
作者：
Pehnelt, Sebastian [1 ]
Osten, Wolfgang [2 ]
Seewig, Joerg [3 ]
机构：
[1] AUDI AG, D-85045 Ingolstadt, Germany
[2] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany
[3] Tech Univ Kaiserslautern, Lehstuhl Messtech & Sensor, D-67663 Kaiserslautern, Germany
来源：
TM-TECHNISCHES MESSEN | 2011年 / 78卷 / 10期
关键词：
Chirp calibration standard; interference microscope; confocal microscope; microtopography; WHITE-LIGHT INTERFEROMETRY;
D O I：
10.1524/teme.2011.0146
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In this article the characteristics of optical topography measuring systems are analyzed by a chirp calibration standard. With the aid of this standard it should be possible to characterize the instrument transfer behaviour of surface measuring devices. In this special case a white light interference microscope and a confocal microscope are compared. The measurement results show differences which can be used for the characterization of optical surface measuring devices with respect to their applicability for technical surfaces.
引用
收藏
页码：457 / 462
页数：6
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