Chirp calibration standards for surface measuring instruments

被引：40
|
作者：
Krueger-Sehm, Rolf [1 ]
Bakucz, Peter [1 ]
Jung, Lena [1 ]
Wilhelms, Harald [1 ]
机构：
[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany
来源：
TM-TECHNISCHES MESSEN | 2007年 / 74卷 / 11期
关键词：
measurement standard; contact stylus instrument; interference microscope; confocal microscope;
D O I：
10.1524/teme.2007.74.11.572
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In this article a chirp-calibration standard is presented. It is intended to test the function transfer of surface measuring instruments by a series of different space scaled frequencies. The standard contains a sequence of sinusoidal waves, the distance, slopes and curvatures of which are well known from the design and the manufacturing process. The surface of the specimen is manufactured by a single diamond turning process. The control data take into account the influence of the cutting tool by morphological operations. First results of measurements on the chirp standard by both a contact stylus instrument and an interference microscope are presented.
引用
收藏
页码：572 / 576
页数：5
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