A microfabricated inductively coupled plasma excitation source

被引：1

作者：

Wang Yong-Qing ^{[1
,3
]}

Pu Yong-Ni ^{[1
]}

Sun Rong-Xia ^{[1
]}

Tang Yu-Jun ^{[1
]}

Chen Wen-Jun ^{[1
]}

Lou Jian-Zhong ^{[1
]}

Ma Wen ^{[2
]}

机构：

[1] Hebei Univ, Coll Elect & Informat Engn, Baoding 071002, Peoples R China

[2] Chinese Peoples Armed Police Forces Acad, Lanfang 065000, Peoples R China

[3] Natl Testing Ctr Iron & Steel, Cent Iron & Steel Res Inst, Beijing 100081, Peoples R China

来源：

CHINESE PHYSICS LETTERS | 2008年 / 25卷 / 01期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A novel miniaturization of inductively coupled plasma (ICP) source based on printed circuit produced using micro-fabrication techniques is presented. The basic parameters of the novel ICP, including its radio frequency, power loss, size, and argon consumption are less than 1% of that for the case of atmospheric pressure ICP source. For example, at 100Pa of argon gas pressure, the present ICP source can be ignited by using the rf power less than 3.5 W. Potential applications of the ICP is discussed.

引用

页码：202 / 204

页数：3

共 50 条

[41] Iodine solid source inductively coupled plasma etching of InP
Matsutani, A
Ohtsuki, H
Koyama, F
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2005, 44 (16-19): : L576 - L577
[42] Effect of capacitive coupling in a miniature inductively coupled plasma source
Takao, Yoshinori
Eriguchi, Koji
Ono, Kouichi
JOURNAL OF APPLIED PHYSICS, 2012, 112 (09)
[43] AN INTRODUCTION TO INDUCTIVELY COUPLED PLASMA SOURCE-MASS SPECTROMETRY
DATE, AR
TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 1983, 2 (10) : 225 - 230
[44] CHARACTERIZATION OF A DUAL INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SOURCE
ALLEN, GM
COLEMAN, DM
APPLIED SPECTROSCOPY, 1987, 41 (03) : 381 - 387
[45] Characterization of a low-frequency inductively coupled plasma source
Tuszewski, M
Tobin, JA
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 1096 - 1101
[46] SPATIAL CHARACTERIZATION OF ANALYTE EMISSION AND EXCITATION TEMPERATURE IN AN INDUCTIVELY COUPLED PLASMA
FURUTA, N
HORLICK, G
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1982, 37 (01) : 53 - 64
[47] SPATIAL EMISSION CHARACTERISTICS AND EXCITATION MECHANISMS IN THE INDUCTIVELY COUPLED PLASMA - A REVIEW
DAVIES, J
SNOOK, RD
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1986, 1 (05) : 325 - 330
[48] An inductively coupled miniature plasma jet source at microwave frequencies
Porteanu, H. E.
Gesche, R.
Wandel, K.
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2013, 22 (03):
[49] EXCITATION, IONIZATION, AND SPECTRAL-LINE EMISSION IN THE INDUCTIVELY COUPLED PLASMA
BLADES, MW
CAUGHLIN, BL
WALKER, ZH
BURTON, LL
PROGRESS IN ANALYTICAL SPECTROSCOPY, 1987, 10 (01): : 57 - 109
[50] INTRODUCTION TO INDUCTIVELY COUPLED PLASMA SOURCE MASS SPECTROMETRY.
Date, Alan R.
1983, (02)

← 1 2 3 4 5 →