Synchrotron X-Ray Topography Observation and Classification of Dislocations in β-Ga2O3 single crystal substrates grown by EFG

被引：0
|
作者：
Yau, Yongzhao [1 ]
Sugawara, Yoshihiro [1 ]
Ishikawa, Yukari [1 ]
Takahashi, Yumiko [2 ]
Hirano, Keiichi [3 ]
机构：
[1] Japan Fine Ceram Ctr, Nagoya, Aichi, Japan
[2] Nihon Univ, Tokyo, Japan
[3] High Energy Accelerator Res Org, Tsukuba, Ibaraki, Japan
来源：
2019 COMPOUND SEMICONDUCTOR WEEK (CSW) | 2019年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页数：1
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