A review: Mid-infrared photonic crystals in silicon and porous silicon based on ion beam irradiation

被引：1

作者：

Dang, Zhiya ^{[1
]}

Breese, Mark B. H. ^{[1
,2
]}

Liu, Dongqing ^{[3
]}

Turaga, Shuvan Prashant ^{[1
]}

Azimi, Sara ^{[1
]}

Song, Jiao ^{[1
]}

Banas, Agnieszka ^{[2
]}

Recio-Sanchez, Gonzalo ^{[4
]}

机构：

[1] Natl Univ Singapore, Dept Phys, CIBA, Singapore 117542, Singapore

[2] Natl Univ Singapore, Singapore Synchrotron Light Source SSLS, Singapore 117603, Singapore

[3] Natl Univ Singapore, Dept Mat Sci & Engn, Singapore 117574, Singapore

[4] Univ Aut noma Madrid, Dept Fis Aplicada, Madrid 28049, Spain

来源：

NANOPHOTONICS AND MICRO/NANO OPTICS II | 2014年 / 9277卷

关键词：

Silicon; Porous silicon; Porosity; Ion beam irradiation; Defect density; Electrochemical anodisation; Photonic crystal; Transmission spectra; FABRICATION; EMISSION;

D O I：

10.1117/12.2072443

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon and porous silicon based photonic crystals are key aspects of photonic circuits with good compatibility with integrated circuits. Here a brief review is carried out on the fabrication of mid infrared photonic crystals using experimental processes of combining ion beam irradiation and electrochemical anodisation of silicon. Experimental processes have been developed to fabricate high aspect ratio trenches in porous silicon, high aspect ratio silicon pillars, buried channels in porous silicon, and multilevel freestanding silicon wires. These structures have the potential to be used for photonic crystals. Several 2D, quasi-3D and 3D mid infrared photonic crystals in porous silicon and silicon have been designed and fabricated.

引用

页数：11

共 50 条

[41] Mid-infrared photonics in silicon and germanium
Soref, Richard
NATURE PHOTONICS, 2010, 4 (08) : 495 - 497
[42] Silicon waveguides and devices for the mid-infrared
Milosevic, Milan M.
Nedeljkovic, Milos
Ben Masaud, Taha M.
Jaberansary, Ehsan
Chong, Harold M. H.
Emerson, Neil G.
Reed, Graham T.
Mashanovich, Goran Z.
APPLIED PHYSICS LETTERS, 2012, 101 (12)
[43] Mid-infrared quantum optics in silicon
Rosenfeld, Lawrence M.
Sulway, Dominic A.
Sinclair, Gary F.
Anant, Vikas
Thompson, Mark G.
Rarity, John G.
Silverstone, Joshua W.
OPTICS EXPRESS, 2020, 28 (25) : 37092 - 37102
[44] Silicon and germanium mid-infrared photonics
Mashanovich, G. Z.
Reed, G. T.
Nedeljkovic, M.
Penades, J. Soler
Mitchell, C. J.
Khokhar, A. Z.
Littlejohns, C. J.
Stankovic, S.
Chen, X.
Shen, L.
Healy, N.
Peacock, A. C.
Alonso-Ramos, C.
Ortega-Monux, A.
Wanguemert-Perez, G.
Molina-Fernandez, I.
Cheben, P.
Ackert, J. J.
Knights, A. P.
Gardes, F. Y.
Thomson, D. J.
QUANTUM SENSING AND NANO ELECTRONICS AND PHOTONICS XIII, 2016, 9755
[45] Mid-Infrared silicon pillar waveguides
Singh, Neetesh
Hudson, Darren D.
Eggleton, Benjamin J.
MICRO+NANO MATERIALS, DEVICES, AND SYSTEMS, 2015, 9668
[46] Mid-Infrared (Mid-IR) Silicon-Based Photonics
Fedeli, Jean-Marc
Nicoletti, Sergio
PROCEEDINGS OF THE IEEE, 2018, 106 (12) : 2302 - 2312
[47] Germanium-on-silicon Vernier-effect photonic microcavities for the mid-infrared
Troia, Benedetto
Penades, Jordi Soler
Khokhar, Ali Z.
Nedeljkovic, Milos
Alonso-Ramos, Carlos
Passaro, Vittorio M. N.
Mashanovich, Goran Z.
OPTICS LETTERS, 2016, 41 (03) : 610 - 613
[48] Low-loss Silicon-photonic Devices for Mid-infrared Applications
Nitkowski, A.
Bollond, P.
Dinu, M.
Cabot, S.
Le Grange, J.
Jaques, J.
Kang, I.
Chang, Chia-Ming
Dong, Po
Luo, Xianshu
Lo, Guo-Qiang
2018 IEEE PHOTONICS CONFERENCE (IPC), 2018,
[49] Mid-infrared photonic gas sensing using a silicon waveguide and an integrated emitter
Consani, C.
Ranacher, C.
Tortschanoff, A.
Grille, T.
Irsigler, P.
Jakoby, B.
SENSORS AND ACTUATORS B-CHEMICAL, 2018, 274 : 60 - 65
[50] Mid-infrared micro-displacement measurement with a bidimensional silicon photonic crystal
Zouache, Tarek
Hocini, Abdesselam
Progress in Electromagnetics Research Letters, 2020, 91 : 77 - 83

← 1 2 3 4 5 →