Advancement of MEMS into RF-filter applications

被引：0
|
作者：
Aigner, R [1 ]
Ella, J [1 ]
Timme, HJ [1 ]
Elbrecht, L [1 ]
Nessler, W [1 ]
Marksteiner, S [1 ]
机构：
[1] Wireless Solut, Infineon Technol, Munich, Germany
来源：
INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST | 2002年
关键词：
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
RF-MEMS filters will substitute conventional filters in mobile communication under certain technical and commercial conditions. Key performance parameters and requirements are discussed in detail. Two different approaches for RF-MEMS filters are reviewed and compared: Electric field driven MEMS-resonators and piezoelectric MEMS resonators. State-of-the-art RF-MEMS filters based on bulk-acoustic-wave (BAW) resonators are presented.
引用
收藏
页码：897 / 900
页数：4
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