Advancement of MEMS into RF-filter applications

被引：0

作者：

Aigner, R ^{[1
]}

Ella, J ^{[1
]}

Timme, HJ ^{[1
]}

Elbrecht, L ^{[1
]}

Nessler, W ^{[1
]}

Marksteiner, S ^{[1
]}

机构：

[1] Wireless Solut, Infineon Technol, Munich, Germany

来源：

INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST | 2002年

关键词：

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

RF-MEMS filters will substitute conventional filters in mobile communication under certain technical and commercial conditions. Key performance parameters and requirements are discussed in detail. Two different approaches for RF-MEMS filters are reviewed and compared: Electric field driven MEMS-resonators and piezoelectric MEMS resonators. State-of-the-art RF-MEMS filters based on bulk-acoustic-wave (BAW) resonators are presented.

引用

页码：897 / 900

页数：4

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