Advancement of MEMS into RF-filter applications

被引：0

作者：

Aigner, R ^{[1
]}

Ella, J ^{[1
]}

Timme, HJ ^{[1
]}

Elbrecht, L ^{[1
]}

Nessler, W ^{[1
]}

Marksteiner, S ^{[1
]}

机构：

[1] Wireless Solut, Infineon Technol, Munich, Germany

来源：

INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST | 2002年

关键词：

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

RF-MEMS filters will substitute conventional filters in mobile communication under certain technical and commercial conditions. Key performance parameters and requirements are discussed in detail. Two different approaches for RF-MEMS filters are reviewed and compared: Electric field driven MEMS-resonators and piezoelectric MEMS resonators. State-of-the-art RF-MEMS filters based on bulk-acoustic-wave (BAW) resonators are presented.

引用

页码：897 / 900

页数：4

共 50 条

[1] MEMS in RF-filter applications: Thin film bulk-acoustic-wave technology
Aigner, R
Transducers '05, Digest of Technical Papers, Vols 1 and 2, 2005, : 5 - 8
[2] On the modelling of ceramic combine RF-filter
Uusitupa, T
Loukkola, J
27TH EUROPEAN MICROWAVE 97, CONFERENCE + EXHIBITION - BRIDGING THE GAP BETWEEN INDUSTRY AND ACADEMIA, VOLS I AND II, 1997, : 1092 - 1097
[3] ENHANCED PIEZOELECTRIC AL1-XSCXN RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION
Bogner, Andreas
Bauder, Ruediger
Timme, Hans-Joerg
Forster, Thomas
Reccius, Christian
Weigel, Robert
Hagelauer, Amelie M.
2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020, : 1258 - 1261
[4] Simulation of a MEMS RF filter
Abdel-Rahman, Eihab M.
Hammad, Bashar K.
Nayfeh, Ali H.
PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, VOL 6, PTS A-C, 2005, : 2075 - 2081
[5] RF MEMS: Filter model
Lobur, M
Sviridova, T
Baybakov, K
MODERN PROBLEMS OF RADIO ENGINEERING, TELECOMMUNICATIONS AND COMPUTER SCIENCE, PROCEEDINGS, 2004, : 92 - 93
[6] Applications in RF MEMS
Air Force Research Labs, United States
不详
IEEE MTT S Int Microwave Symp Dig, 2006, (131):
[7] MEMS for RF applications
Bhat, N
IETE TECHNICAL REVIEW, 2004, 21 (02) : 133 - 136
[8] Tunable RF-Filter Using Mn-Doped BST Ceramic Varactors
Houndonougbo, F.
Costes, R.
Courreges, S.
Madrangeas, V.
Cros, D.
Pate, M.
Ganne, J. P.
Monteil, P.
FERROELECTRICS, 2010, 407 : 3 - 9
[9] RF bandpass tunable filter using RF MEMS
Alam, A. H. M. Zahirul
Islam, Md. Rafiqul
Khan, Sheroz
Farhana, Soheli
Salleh, Nik Noor Atikah Bt. Nik Mohd.
Aziz, Noraini
2008 INTERNATIONAL CONFERENCE ON COMPUTER AND COMMUNICATION ENGINEERING, VOLS 1-3, 2008, : 609 - 612
[10] AN INTEGRATED RF MEMS TUNABLE FILTER
Shim, Yonghyun
Ruan, Jia
Wu, Zhengzheng
Rais-Zadeh, Mina
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,

← 1 2 3 4 5 →