High temperature storage reliability investigation of the Al-Cu wire bond interface

被引:34
|
作者
Pelzer, R. [1 ]
Nelhiebel, M. [1 ,2 ]
Zink, R. [1 ]
Woehlert, S. [1 ]
Lassnig, A. [3 ]
Khatibi, G. [3 ]
机构
[1] Infineon Technol Austria AG, A-9500 Villach, Austria
[2] KAI Competence Ctr Automot & Ind Elect, A-9524 Villach, Austria
[3] Univ Vienna, Fac Phys, A-1090 Vienna, Austria
关键词
ALUMINUM; IMC;
D O I
10.1016/j.microrel.2012.06.070
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study the intermetallic compound (IMC) formation of annealed 50 mu m copper wires, thermosonically nailhead bonded to thick Al-0.5 wt.% Cu pads, was investigated. The annealing experimental matrix covered the full range of Al consumption. The IMC thickness (growth behavior), obtained from FIB cuts, follows an Arrhenius type equation. TEM was used to identify the three formed intermetallic phases - CuAl2, CuAl and Cu9Al4 - which were detected in several interface FIB cuts. The activation energy for the growth of the total IMC stack was found to be 1.26 eV. The impact on bond strength was studied using ball shear test. The test results did not show a significant decrease in interface strength across the full experimental matrix even Al being fully consumed. Special procedures were applied to improve pad surface condition and wire bonding process parameters to get parallel and homogeneous IMC layer growth, and therefore reliable data. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1966 / 1970
页数:5
相关论文
共 50 条
  • [41] Effect of Moisture and Temperature on Al-Cu Interfacial Strength
    Teng, Hui
    Zhang, Huiliang
    Yang, Hongbo
    Zhou, Ming
    Tsui, Anthony C.
    2008 INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY & HIGH DENSITY PACKAGING, VOLS 1 AND 2, 2008, : 688 - 691
  • [42] Reflow of Al-Cu by low temperature germane reactions
    Joshi, RV
    MICROELECTRONIC DEVICE AND MULTILEVEL INTERCONNECTION TECHNOLOGY II, 1996, 2875 : 250 - 257
  • [43] Effects of Cu and Pd addition on Au bonding wire/Al pad interfacial reactions and bond reliability
    Sang-Ah Gam
    Hyoung-Joon Kim
    Jong-Soo Cho
    Yong-Jin Park
    Jeong-Tak Moon
    Kyung-Wook Paik
    Journal of Electronic Materials, 2006, 35 : 2048 - 2055
  • [44] Effects of Cu and Pd addition on au bonding wire/Al pad interfacial reactions and bond reliability
    Gam, Sang-Ah
    Kim, Hyoung-Joon
    Cho, Jong-Soo
    Park, Yong-Jin
    Moon, Jeong-Tak
    Paik, Kyung-Wook
    JOURNAL OF ELECTRONIC MATERIALS, 2006, 35 (11) : 2048 - 2055
  • [45] Detailed investigation of ultrasonic Al-Cu wire-bonds: II. Microstructural evolution during annealing
    Drozdov, M.
    Gur, G.
    Atzmon, Z.
    Kaplan, W. D.
    JOURNAL OF MATERIALS SCIENCE, 2008, 43 (18) : 6038 - 6048
  • [46] Comprehensive transmission electron microscopy study on Cu–Al intermetallic compound formation at wire bond interface
    In-Tae Bae
    Dae Young Jung
    William T. Chen
    Scott Chen
    Jenny Chang
    Journal of Materials Research, 2014, 29 : 2787 - 2798
  • [47] The Interface Behavior of the Cu-Al Bond System in High Humidity Conditions
    Kim, S. H.
    Park, J. W.
    Hong, S. J.
    Moon, J. T.
    2010 12TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2010, : 545 - 549
  • [48] Effect of carbon nanotubes and high temperature extrusion on the microstructure evolution of Al-Cu alloy
    Li, Chunhong
    Qiu, Risheng
    Luan, Baifeng
    Li, Zhiqiang
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2017, 704 : 38 - 44
  • [49] OPTIMIZATION OF HIGH-TEMPERATURE COMPRESSION OF AS-CAST AL-CU EUTECTIC ALLOY
    NASSEF, GA
    ELASHRAM, A
    SUERY, M
    METALS TECHNOLOGY, 1984, 11 (MAY): : 196 - 200
  • [50] Mechanical reliability of Au and Cu wire bonds to Al, Ni/Au and Ni/Pd/Au capped Cu bond pads
    Ratchev, Petar
    Stoukatch, Serguei
    Swinnen, Bart
    MICROELECTRONICS RELIABILITY, 2006, 46 (08) : 1315 - 1325