Progress in Development of Monolithic Active Pixel Detector for X-ray Astronomy with SOI CMOS Technology

被引：20

作者：

Nakashima, Shinya ^{[1
]}

Ryu, Syukyo Gando ^{[1
]}

Tsuru, Takeshi Go ^{[1
]}

Takeda, Ayaki

Arai, Yasuo ^{[3
]}

Miyoshi, Toshinobu ^{[2
,3
]}

Ichimiya, Ryo ^{[3
]}

Ikemoto, Yukiko ^{[3
]}

Imamura, Toshifumi ^{[4
]}

Ohmoto, Takafumi ^{[4
]}

Iwata, Atsushi ^{[4
]}

机构：

[1] Kyoto Univ, Dept Phys, Grad Sch Sci, Sakyo Ku, Kitashirakawa Oiwake Cho, Kyoto 6068502, Japan

[2] Grad Univ Adv Studies SOKENDAI, High Energy Accelerator Res Org KEK, Grad Sch High Energy Accelerator Sci, Dept Particle & Nucl Phys, Tsukuba, Ibaraki 3050801, Japan

[3] KEK, High Energy Accelerator Res Org, Inst Particle & Nucl Studies, Tsukuba, Ibaraki 3050801, Japan

[4] A R Tec Corp, Hiroshima 7390046, Japan

来源：

PROCEEDINGS OF THE 2ND INTERNATIONAL CONFERENCE ON TECHNOLOGY AND INSTRUMENTATION IN PARTICLE PHYSICS (TIPP 2011) | 2012年 / 37卷

关键词：

SOI; pixel; X-ray imaging; X-ray spectroscopy; SPECTROMETER;

D O I：

10.1016/j.phpro.2012.04.100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have been developing an active pixel sensor for X-ray astronomy. In this paper, we report on the design and the characterization of the recently-developed device named XRPIX1-FZ. We applied the high-resistivity Si wafer (similar to 7 k Omega cm) to the sensor layer for a thick depletion layer. The chemical-mechanical polishing, which we applied to smooth the rough backside of the Si wafer, successfully reduced the dark current. We used the single-pixel readout mode and achieved the energy resolution of 260 eV in FWHM at 8 keV. Moreover, we developed the 3 x 3 pixel readout mode for the evaluation of split events and confirmed the full depletion of 250 mu m thick at the reverse-bias voltage of 30 V. (C) 2012 Published by Elsevier B.V. Selection and/or peer review under responsibility of the organizing committee for TIPP 11.

引用

页码：1373 / 1380

页数：8

共 50 条

[21] Development of on-chip pattern processing in event-driven SOI pixel detector for X-ray astronomy with background rejection purpose
Takeda, A.
Mori, K.
Nishioka, Y.
Hida, T.
Yukumoto, M.
Kanemaru, Y.
Yonemura, S.
Mieda, K.
Tsuru, T. G.
Tanaka, T.
Kurachi, I
Arai, Y.
JOURNAL OF INSTRUMENTATION, 2020, 15 (12)
[22] High spatial resolution monolithic pixel detector in SOI technology
Bugiel, R.
Bugiel, S.
Dannheim, D.
Fiergolski, A.
Hynds, D.
Idzik, M.
Kapusta, P.
Kucewicz, W.
Munker, M.
Nurnberg, A.
Spannagel, S.
Swientek, K.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2021, 988
[23] A CMOS ANALOG INTEGRATED CIRCUIT FOR PIXEL X-RAY DETECTOR
Fitrio, David
Tjoa, Suhardi
Mohan, Anand
Veljanovski, Ronny
Berry, Andrew
Panjkovic, Goran
JOURNAL OF CIRCUITS SYSTEMS AND COMPUTERS, 2011, 20 (01) : 71 - 87
[24] A CMOS Analog Integrated Circuit for Pixel X-ray Detector
Fitrio, David
Tjoa, Suhardi
Mohan, Anand
Veljanovski, Ronny
Berry, Andrew
PROCEEDINGS OF THE 2009 12TH INTERNATIONAL SYMPOSIUM ON INTEGRATED CIRCUITS (ISIC 2009), 2009, : 408 - +
[25] X-ray metal material evaluation using an SOI pixel detector
Mitsui, S.
Sasaki, T.
Shinya, M.
Arai, Y.
Miyoshi, T.
Nishimura, R.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2020, 979
[26] Evaluation of the X-ray SOI pixel detector with the on-chip ADC
Matsuhashi, Hiroumi
Hagino, Kouichi
Bamba, Aya
Takeda, Ayaki
Yukumoto, Masataka
Mori, Koji
Nishioka, Yusuke
Tsuru, Takeshi Go
Uenomachi, Mizuki
Ikeda, Tomonori
Matsuda, Masamune
Narita, Takuto
Suzuki, Hiromasa
Tanaka, Takaaki
Kurachi, Ikuo
Kohmura, Takayoshi
Uchida, Yusuke
Arai, Yasuo
Kawahito, Shoji
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2024, 1064
[27] Progress of FD-SOI Technology for Monolithic Pixel Detectors
Okihara, Masao
Kasai, Hiroki
Miura, Noriyuki
Kuriyama, Naoya
Nagatomo, Yoshiki
Hatsui, Takaki
Omodani, Motohiko
Miyoshi, Toshinobu
Arai, Yasuo
2012 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE RECORD (NSS/MIC), 2012, : 471 - 474
[28] Recent progress in the development of a B-factory monolithic active pixel detector
Stanic, S.
Aihara, H.
Barbero, M.
Bozek, A.
Browder, T.
Hazumi, M.
Kennedy, J.
Kent, N.
Olsen, S.
Palka, H.
Rosen, M.
Ruckman, L.
Trabelsi, K.
Tsuboyama, T.
Uchida, K.
Varner, G.
Yang, Q.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2006, 568 (01): : 181 - 184
[29] Monolithic SOI Pixel Detector for x-Ray Imaging Applications with high Dynamic Range and MHz Frame-Rate
Peric, Ivan
Mandl, Felix
2011 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE (NSS/MIC), 2011, : 1051 - 1056
[30] Development of an X-ray imaging system with SOI pixel detectors
Nishimura, Ryutaro
Arai, Yasuo
Miyoshi, Toshinobu
Hirano, Keiichi
Kishimoto, Shunji
Hashimoto, Ryo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2016, 831 : 49 - 54

← 1 2 3 4 5 →