MICROMACHINED THIN FILM PLATE ACOUSTIC RESONATORS (FPAR): THEORY AND APPLICATIONS

被引：0
|
作者：
Yantchev, V. [1 ]
Katardjiev, I. [1 ]
机构：
[1] Uppsala Univ, Dept Solid State Elect, S-75121 Uppsala, Sweden
来源：
EFTF-2010 24TH EUROPEAN FREQUENCY AND TIME FORUM | 2010年
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中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
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页数：8
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