Investigation of film bulk acoustic resonators for sensing applications in liquid environment

被引：6
|
作者：
Zhou, Yu [1 ]
Zou, Yang [1 ]
Gao, Chao [1 ]
Xu, Qinwen [1 ]
Tong, Xin [1 ]
Lin, Binghui [1 ]
Liu, Yan [1 ]
Soon, Bo Woon [2 ,3 ]
Cai, Yao [1 ,2 ,3 ]
Sun, Chengliang [1 ,2 ,3 ]
机构：
[1] Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China
[2] Hubei Yangtze Memory Labs, Wuhan 430205, Peoples R China
[3] Wuhan Univ, Sch Microelect, Wuhan 430072, Peoples R China
来源：
APPLIED PHYSICS LETTERS | 2022年 / 121卷 / 21期
关键词：
ZNO THIN-FILM; DESIGN; SENSITIVITY; VISCOSITY; CONSTANTS; GLYCEROL; WAVES;
D O I：
10.1063/5.0124829
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The thin film bulk acoustic resonator (FBAR) has emerged as a promising choice for liquid sensors because of its high frequency and sensitivity. To investigate the potential of FBAR devices working as the liquid sensors, we study the operating law of FBAR in liquid environments and explore the different loading effects of liquid on the shear mode and longitudinal mode. By analyzing the device and liquid interactions, we modify the Mason model of FBAR in the liquid environment. Subsequently, the influence of the piezoelectric film with different tilt angles and liquids on the characteristics of FBAR is discussed. We also prepared Sc0.2Al0.8N film-based FBAR to confirm the influence of different liquid environments on the resonant performances. The results show that the frequency drift of FBAR in the shear mode is related to density and viscosity of liquid, and the frequency drift of FBAR in the longitudinal mode is related to bulk modulus and density of liquid. The resonant frequency of FBAR in the shear mode is more sensitive with glycerol solution than that of FBAR in the longitudinal mode. This work can provide a research basis for the application of FBAR liquid sensors. Published under an exclusive license by AIP Publishing.
引用
收藏
页数：8
相关论文
共 50 条
  • [1] Investigation of magnetostrictive film bulk acoustic resonators (MFBAR) for magnetic field sensing applications
    Vinita, J. Arout
    Chelvane, J. Arout
    Singh, Jitendra
    SENSORS AND ACTUATORS A-PHYSICAL, 2023, 362
  • [2] Ferroelectric film bulk acoustic wave resonators for liquid viscosity sensing
    Vorobiev, A.
    Gevorgian, S.
    JOURNAL OF APPLIED PHYSICS, 2013, 114 (08)
  • [3] Sensing the world with film bulk acoustic resonators
    Qiu, Xiaotun
    Micro and Nanosystems, 2011, 3 (02)
  • [4] Novel electrode configurations of bulk acoustic wave resonators for liquid sensing applications
    Zhang, C
    Vetelino, JF
    2000 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2000, : 421 - 426
  • [5] Bulk acoustic wave resonators for sensing applications: A review
    Vinita
    Pareek, Deepak
    Islam, Sk. Masiul
    Singh, Jitendra
    SENSORS AND ACTUATORS A-PHYSICAL, 2024, 378
  • [6] Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids
    Link, M
    Schreiter, N
    Weber, J
    Primig, R
    Pitzer, D
    Gabl, R
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (02) : 492 - 496
  • [7] An Investigation on Efficient Acoustic Energy Reflection of Flexible Film Bulk Acoustic Resonators
    Chuanhai Gao
    Yuan Jiang
    Lin Zhang
    Bohua Liu
    Menglun Zhang
    NanotechnologyandPrecisionEngineering, 2018, 1 (02) : 129 - 132
  • [8] High Overtone Bulk Acoustic Resonators for High Temperature Sensing Applications
    Courjon, Emilie
    Francois, Bruno
    Martin, Gilles
    Daniau, William
    Baron, Thomas
    Loschonsky, Marc
    Friedt, Jean-Michel
    Belgacem, Brahim
    Reindl, Leonard
    Ballandras, Sylvain
    2013 JOINT EUROPEAN FREQUENCY AND TIME FORUM & INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC), 2013, : 992 - +
  • [9] Investigation of spurious resonances in thin film bulk acoustic wave resonators
    Reinhardt, A
    Laude, V
    Solal, M
    Ballandras, S
    Steichen, W
    2004 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-3, 2004, : 1698 - 1701
  • [10] Thin film bulk wave acoustic resonators (FBAR) for wireless applications
    Ruby, RC
    Bradley, P
    Oshmyansky, Y
    Chien, A
    Larson, JD
    2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2001, : 813 - 821
12345