Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

被引：83
|
作者：
Link, M
Schreiter, N
Weber, J
Primig, R
Pitzer, D
Gabl, R
机构：
[1] Siemens AG, Corp Technol, D-81739 Munich, Germany
[2] Univ Nancy 1, CNRS, UMR 7040, Lab Phys Milieux Ionises & Applicat, F-54506 Vandoeuvre Les Nancy, France
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2006年 / 53卷 / 02期
关键词：
D O I：
10.1109/TUFFC.2006.1593389
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used. Coupling factors k(2). of 1.7% and Q-factors of 312 were determined in air. Q-factors of 3.92 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.
引用
收藏
页码：492 / 496
页数：5
相关论文
共 50 条
  • [1] A high-Q hybrid acoustic mode in thin film ZnO solidly mounted resonators
    Wathen, Adam D.
    Munir, Farasat
    Hunt, William D.
    APPLIED PHYSICS LETTERS, 2009, 95 (12)
  • [2] Progress in Materials Used for Solidly Mounted Film Bulk Acoustic Resonators
    Liu Gang
    Zhu Jia-Qi
    Wang Sai
    Lu Xiao-Xin
    Liu Yuan-Peng
    Huo Shi-Yu
    Yuan Xin-Wei
    JOURNAL OF INORGANIC MATERIALS, 2010, 25 (12) : 1233 - 1241
  • [3] Synthesis and bulk acoustic wave properties on the dual mode frequency shift of solidly mounted resonators
    Chung, Chung-Jen
    Chen, Ying-Chung
    Cheng, Chien-Chuan
    Kao, Kuo-Sheng
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2008, 55 (04) : 857 - 864
  • [4] Design, Analysis and Finite Element Modeling of Solidly Mounted Film Bulk Acoustic Resonator for Gas Sensing Applications
    Johar, Arun K.
    Varma, Tarun
    Periasamy, C.
    Agarwal, Ajay
    Boolchandani, D.
    JOURNAL OF ELECTRONIC MATERIALS, 2020, 49 (02) : 1503 - 1511
  • [5] Optimized Reflector Stacks for Solidly Mounted Bulk Acoustic Wave Resonators
    Jose, Sumy
    Jansman, Andre B. M.
    Hueting, Raymond J. E.
    Schmitz, Jurriaan
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2010, 57 (12) : 2753 - 2763
  • [6] Design, Analysis and Finite Element Modeling of Solidly Mounted Film Bulk Acoustic Resonator for Gas Sensing Applications
    Arun K. Johar
    Tarun Varma
    C. Periasamy
    Ajay Agarwal
    D. Boolchandani
    Journal of Electronic Materials, 2020, 49 : 1503 - 1511
  • [7] Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators
    Rughoobur, G.
    DeMiguel-Ramos, M.
    Mirea, T.
    Clement, M.
    Olivares, J.
    Diaz-Duran, B.
    Sangrador, J.
    Miele, I.
    Milne, W. I.
    Iborra, E.
    Flewitt, A. J.
    APPLIED PHYSICS LETTERS, 2016, 108 (03)
  • [8] Bulk acoustic wave resonance characteristic modified by reducing the defects in ZnO-based solidly mounted resonators
    Ma, Lei
    Zhang, Bo
    Guo, Xin
    Wang, Peng
    Liu, Qingfang
    Zheng, Kun
    Li, Xiling
    Wang, Jianbo
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2022, 137
  • [9] Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator
    Corso, Christopher D.
    Dickherber, Anthony
    Hunt, William D.
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (05)
  • [10] Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator
    Corso, Christopher D.
    Dickherber, Anthony
    Hunt, William D.
    Journal of Applied Physics, 2007, 101 (05):
12345