Design, Analysis and Finite Element Modeling of Solidly Mounted Film Bulk Acoustic Resonator for Gas Sensing Applications

This paper reports the effect of the design parameters of a solidly mounted film bulk acoustic resonator (SMFBAR) for better gas sensing performance. The electrical equivalent circuit of the proposed device has been developed with the help of a Butterworth Van-Dyke (BVD) circuit. The electro-mechanical response of the SMFBAR has been obtained with the help of 3-D finite element method (FEM) analysis. The analytical modeling and FEM simulation results are compared. The physical parameters of the proposed design such as piezoelectric layer material, its thickness, active area of the device and sensing layer thickness affecting the characteristics of the SMFBAR have been investigated in detail. To achieve enhanced sensitivity, the variation of square active area has been analysed with one side dimension ranging from 700 μm to 300 μm. Gas sensing performance of the proposed sensor is tested by exposing toluene gas concentration ranging from 0 ppm to 500 ppm and enhanced sensitivity of 20 kHz/ppm has been achieved and reported. Also, it is reported that the variation in ratio of electrode layer thickness to piezoelectric layer thickness results in improvement of coupling coefficient (keff2) up to 7.46%.