Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

被引：83
|
作者：
Link, M
Schreiter, N
Weber, J
Primig, R
Pitzer, D
Gabl, R
机构：
[1] Siemens AG, Corp Technol, D-81739 Munich, Germany
[2] Univ Nancy 1, CNRS, UMR 7040, Lab Phys Milieux Ionises & Applicat, F-54506 Vandoeuvre Les Nancy, France
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2006年 / 53卷 / 02期
关键词：
D O I：
10.1109/TUFFC.2006.1593389
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used. Coupling factors k(2). of 1.7% and Q-factors of 312 were determined in air. Q-factors of 3.92 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.
引用
收藏
页码：492 / 496
页数：5
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