CHIRPED PULSED BIAS POWER IN INDUCTIVELY COUPLED PLASMA REACTORS

被引：0
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作者：
Lanham, Steven J. [1 ]
Kushner, Mark J. [1 ]
机构：
[1] Univ Michigan, Ann Arbor, MI 48109 USA
来源：
2016 43RD IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS) | 2016年
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页数：1
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