Measuring Thin Transparent Films Precisely: Reliability of reflectometric measurements for optical thickness determination

被引：1

作者：

Quinten, Michael ^{[1
]}

机构：

[1] Wissensch Tech Software, D-52457 Aldenhoven, Germany

来源：

VAKUUM IN FORSCHUNG UND PRAXIS | 2019年 / 31卷 / 01期

关键词：

D O I：

10.1002/vipr.201900706

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Fast Fourier transform (FTT) and nonlinear regression analysis are established analysis methods in the context of reflectometric layer thickness determination on thin transparent films. Where applicable, FFT is a very fast method for determining film thickness, but with limitations in resolution. The far more complex nonlinear regression analysis provides more accurate results. But it also has its problems which are discussed here.

引用

页码：27 / 29

页数：3

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