Measuring Thin Transparent Films Precisely: Reliability of reflectometric measurements for optical thickness determination

被引：1
|
作者：
Quinten, Michael [1 ]
机构：
[1] Wissensch Tech Software, D-52457 Aldenhoven, Germany
来源：
VAKUUM IN FORSCHUNG UND PRAXIS | 2019年 / 31卷 / 01期
关键词：
D O I：
10.1002/vipr.201900706
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Fast Fourier transform (FTT) and nonlinear regression analysis are established analysis methods in the context of reflectometric layer thickness determination on thin transparent films. Where applicable, FFT is a very fast method for determining film thickness, but with limitations in resolution. The far more complex nonlinear regression analysis provides more accurate results. But it also has its problems which are discussed here.
引用
收藏
页码：27 / 29
页数：3
相关论文
共 50 条
  • [21] OPTICAL METHODS FOR THICKNESS MEASUREMENTS ON THIN METAL-FILMS
    POKROWSKY, P
    APPLIED OPTICS, 1991, 30 (22) : 3228 - 3232
  • [22] THICKNESS MEASUREMENTS OF THIN FILMS
    PLESSNER, KW
    NATURE, 1946, 158 (4025) : 915 - 915
  • [23] MEASURING THICKNESS OF THIN TRANSPARENT FILMS BY MEANS OF A TYPE MII-4 INTERFEROMETER
    MILOSLAVSKII, VK
    RYAZANOV, AN
    MEASUREMENT TECHNIQUES, 1974, 17 (04) : 548 - 551
  • [24] A computer program for determination of thin films thickness and optical constants
    Caricato, AP
    Fazzi, A
    Leggieri, G
    APPLIED SURFACE SCIENCE, 2005, 248 (1-4) : 440 - 445
  • [25] Subtractive fabrication of ferroelectric thin films with precisely controlled thickness
    levlev, Anton, V
    Chyasnavichyus, Marius
    Leonard, Donovan N.
    Agar, Joshua C.
    Velarde, Gabriel A.
    Martin, Lane W.
    Kalinin, Sergei, V
    Maksymovych, Petro
    Ovchinnikova, Olga S.
    NANOTECHNOLOGY, 2018, 29 (15)
  • [26] METHODS FOR MEASURING THICKNESS OF THIN FILMS
    PALATNIK, LS
    ZAICHIK, RI
    GLADKIKH, NT
    KHOTKEVI.VI
    INDUSTRIAL LABORATORY, 1968, 34 (02): : 214 - &
  • [27] New method for measuring thickness in thin transparent medium
    Sousa, Raul A. R. C.
    Baptista, Antonio M. G.
    INTERNATIONAL CONFERENCE ON APPLICATIONS OF OPTICS AND PHOTONICS, 2011, 8001
  • [28] Thickness determination of thin transparent crystal layers
    Bauer, G
    ANNALEN DER PHYSIK, 1931, 8 (01) : 7 - 46
  • [29] OPTICAL THICKNESS MONITOR FOR TRANSPARENT FILMS.
    Purshotham, N.
    Kumari, Krishna T.
    Mukerjee, A.K.
    Dutta, V.
    Chopra, K.L.
    Indian Journal of Pure and Applied Physics, 1982, 20 (08): : 642 - 646
  • [30] OPTICAL-THICKNESS MONITOR FOR TRANSPARENT FILMS
    PURSHOTHAM, M
    KUMARI, TK
    DUTTA, V
    MUKERJEE, AK
    CHOPRA, KL
    INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1982, 20 (08) : 642 - 646
12345