Polymer Magnetic Composite Core Boosts Performance of Three-Dimensional Micromachined Inductive Contactless Suspension

被引：13
|
作者：
Poletkin, Kirill V. [1 ,2 ]
Lu, Zhiqiu [2 ]
Moazenzadeh, Ali [2 ,3 ]
Mariappan, Saravana Guru [2 ,3 ]
Korvink, Jan G. [1 ]
Wallrabe, Ulrike [2 ]
Badilita, Vlad [1 ]
机构：
[1] Karlsruhe Inst Technol, Inst Microstruct Technol, D-76344 Eggenstein Leopoldshafen, Germany
[2] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Microactuators, D-79110 Freiburg, Germany
[3] Voxalyt GmbH, D-76228 Karlsruhe, Germany
来源：
IEEE MAGNETICS LETTERS | 2016年 / 7卷
基金：
欧洲研究理事会;
关键词：
Electromagnetics; electromagnetic levitation; contactless suspension; frictionless micro-bearings; inductive suspension; micro-coils; LEVITATION; MICROTRANSFORMERS; MICROCOILS;
D O I：
10.1109/LMAG.2016.2612181
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We introduce a newly developed polymer magnetic composite for use as a high resistivity, high permeability magnetic core to significantly improve the energy consumption of micromachined inductive suspensions. Compared to a similar inductive suspension structure without a core, the electrical current required to obtain a levitation height of 110 mu m is 65 mA versus 120 mA. The use of the core brings the operating temperature in ambient air at 27 degrees C down from 120 degrees C to 60 degrees C, the lowest value among all previously reported micromachined inductive suspensions. Beyond this performance improvement, the present contribution demonstrates the feasibility of three-dimensional micromachined inductive suspensions as integrated elements of levitated micromachined systems.
引用
收藏
页码：1 / 3
页数：3
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