Polymer Magnetic Composite Core Boosts Performance of Three-Dimensional Micromachined Inductive Contactless Suspension

被引：13

作者：

Poletkin, Kirill V. ^{[1
,2
]}

Lu, Zhiqiu ^{[2
]}

Moazenzadeh, Ali ^{[2
,3
]}

Mariappan, Saravana Guru ^{[2
,3
]}

Korvink, Jan G. ^{[1
]}

Wallrabe, Ulrike ^{[2
]}

Badilita, Vlad ^{[1
]}

机构：

[1] Karlsruhe Inst Technol, Inst Microstruct Technol, D-76344 Eggenstein Leopoldshafen, Germany

[2] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Microactuators, D-79110 Freiburg, Germany

[3] Voxalyt GmbH, D-76228 Karlsruhe, Germany

来源：

IEEE MAGNETICS LETTERS | 2016年 / 7卷

基金：

欧洲研究理事会;

关键词：

Electromagnetics; electromagnetic levitation; contactless suspension; frictionless micro-bearings; inductive suspension; micro-coils; LEVITATION; MICROTRANSFORMERS; MICROCOILS;

D O I：

10.1109/LMAG.2016.2612181

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We introduce a newly developed polymer magnetic composite for use as a high resistivity, high permeability magnetic core to significantly improve the energy consumption of micromachined inductive suspensions. Compared to a similar inductive suspension structure without a core, the electrical current required to obtain a levitation height of 110 mu m is 65 mA versus 120 mA. The use of the core brings the operating temperature in ambient air at 27 degrees C down from 120 degrees C to 60 degrees C, the lowest value among all previously reported micromachined inductive suspensions. Beyond this performance improvement, the present contribution demonstrates the feasibility of three-dimensional micromachined inductive suspensions as integrated elements of levitated micromachined systems.

引用

页码：1 / 3

页数：3

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