Oxidition resistance of multi-arc ion plating TiN Films

被引：0
|
作者：
Wang, Jie [1 ]
Jiang, Shihang [1 ]
Wang, JuanJuan [1 ]
机构：
[1] Yangzhou Univ, Coll Mech Engn, Yangzhou 225127, Jiangsu, Peoples R China
来源：
MECHATRONICS AND INTELLIGENT MATERIALS III, PTS 1-3 | 2013年 / 706-708卷
关键词：
TiN film; Oxidation resistance; Adhesion strength;
D O I：
10.4028/www.scientific.net/AMR.706-708.180
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Depositing TiN Film on the surface of 4Cr5MoSiV1 with multi-arc ion plating technology method. And 350 degrees C, 450 degrees C, 550 degrees C and 650 degrees C short oxidation test and 550 degrees C cyclic oxidation test. By scanning electron microscopy (SEM) and electron spectrometry (EDS) to analysis micro-structure and phase structure of test samples, study TiN film on oxidation resistance, and utilize indentation method to measure mechanical properties. Results show: In a short time under oxidizing conditions, at 550 degrees C the TiN film still has a good oxidation resistance. The film still have a sufficient bonding strength below 600 degrees C.
引用
收藏
页码：180 / 183
页数：4
相关论文
共 50 条
  • [21] Influence of multi-arc ion plating technique on the interface and microstructure of TiN/Ti and Cr/Cu contact system
    Lin, XH
    Liu, X
    ACTA PHYSICA SINICA, 2000, 49 (11) : 2220 - 2224
  • [22] Effect of diffusion treatment on high-temperature oxidation resistance of multi-arc ion plating Al films on TiAl alloy
    Wu, Xiang-qing
    Xie, Fa-qin
    Hu, Zong-chun
    Shen, Shi-da
    MANUFACTURING SCIENCE AND ENGINEERING, PTS 1-5, 2010, 97-101 : 1399 - 1403
  • [23] MICROSTRUCTURE AND WEAR RESISTANCE OF TiAlZrCr/(Ti, Al, Zr, Cr)N GRADIENT FILMS DEPOSITED BY MULTI-ARC ION PLATING
    Zhao Shilu
    Zhang Zhen
    Zhang Jun
    Wang Jianming
    Zhang Zhenggui
    ACTA METALLURGICA SINICA, 2016, 52 (06) : 747 - 754
  • [24] Influence of multi-arc ion plating technique on the interface and microstructure of TiN/Ti and Cr/Cu contact system
    Lin, Xiu-Hua
    Liu, Xin
    Wuli Xuebao/Acta Physica Sinica, 2000, 49 (11): : 2223 - 2224
  • [25] The structure of TiN films deposited by arc ion plating
    Matsue, T
    Hanabusa, T
    Ikeuchi, Y
    VACUUM, 2002, 66 (3-4) : 435 - 439
  • [26] Effects of Ion Nitriding on Tribological Performance of CrN Coating by Multi-arc Ion Plating
    Yang J.-Z.
    Li L.
    Zhang M.
    Zhou S.-L.
    Zhan Q.-Q.
    Huang A.-W.
    Yang L.-J.
    Chen H.-B.
    Li Z.-S.
    Surface Technology, 2022, 51 (11): : 262 - 270
  • [27] Influence of Deposition Parameters on TiCxN1-x Composite Films by Multi-aRC Ion Plating
    Ke, Deqing
    Pan, Yingjun
    Zhang, Heng
    Hong, Bo
    Lu, Xufeng
    PROCEEDINGS OF THE 2014 INTERNATIONAL CONFERENCE ON MATERIALS SCIENCE AND ENERGY ENGINEERING (CMSEE 2014), 2015, : 59 - 64
  • [28] Microstructure, Hardness and Oxidation Resistance of CrN and CrAIN Coatings Synthesized by Multi-arc Ion Plating Technology
    Cai, Zhihai
    Zhang, Ping
    Di, Yuelan
    ADVANCES IN BUILDING MATERIALS, PTS 1-3, 2011, 168-170 : 2430 - 2433
  • [29] Structure and Tribological Properties of CrTiAlN Coatings Deposited by Multi-Arc Ion Plating
    田灿鑫
    杨兵
    何俊
    王红军
    王泽松
    王广甫
    付德君
    Plasma Science and Technology, 2011, 13 (01) : 55 - 60
  • [30] Effects of Al Content on the Microstructures and Oxidation Resistance of Cr1-xAlxN films synthesized by Multi-arc Ion Plating Method
    Cai, Zhihai
    Di, Yuelan
    Yang, Zhen
    Zhang, Ping
    MECHANICAL ENGINEERING AND GREEN MANUFACTURING II, PTS 1 AND 2, 2012, 155-156 : 579 - 584
12345