Ultrahigh-resolution MEMS Humidity Sensing Elements Based On Film Bulk Acoustic Wave Resonators

被引：0

作者：

Zhao, Hongyuan ^{[1
]}

Zhang, Daihua ^{[1
]}

Pang, Wei ^{[1
]}

Zhang, Hao ^{[1
]}

机构：

[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China

来源：

MICRO-NANO TECHNOLOGY XIV, PTS 1-4 | 2013年 / 562-565卷

关键词：

Humidity sensor; MEMS; Bulk acoustic wave resonator; SENSORS;

D O I：

10.4028/www.scientific.net/KEM.562-565.1257

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A high-resolution humidity sensor based on MEMS FBAR with spin-coated PVA thin film is reported. The sensors exhibit very high sensitivity to water vapor and are able to detect down to 0.08 % change in relative humidity by monitoring the shift in series resonant frequency of the FBARs. The integration of these devices with CMOS oscillating circuits and RF front-end chips will create great potential of FBAR based mass sensors in a wide variety of applications in chemical and biological sensing.

引用

页码：1257 / 1262

页数：6

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