Reliable wet-chemical cleaning method for sapphire substrates

被引：0
|
作者：
Zhang, Dan [1 ]
Gan, Yang [1 ]
机构：
[1] Harbin Inst Technol, Sch Chem Engn & Technol, Harbin 150001, Heilongjiang, Peoples R China
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2012年 / 244卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
443-COLL
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页数：1
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