Compact model for a cantilever beam MEM contact switch

A compact model for a cantilever beam microclectromechanical (MEM) contact switch is constructed. The beam deflection is modelled by discretising the beam along its length. The distributed capacitance, electrostatic force and squeezed-film fluid force are also calculated at the same discrete points. The electromechanical contact tip is modelled as a lumped contact force and conductance. The model is implemented with a nonlinear equivalent circuit utilising the components in the MEMS module of the circuit simulation and design tool Aplac. This enables nonlinear time and frequency domain simulations. This paper presents transient on/off characteristics simulations, and analyses and compares the S-parameters at the on- and off- positions.