Compact model for a cantilever beam MEM contact switch

被引：0
|
作者：
Veijola, T [1 ]
机构：
[1] Aalto Univ, Dept Elect & Commun Engn, Circuit Theory Lab, FIN-02015 Helsinki, Finland
来源：
PROCEEDINGS OF THE 2005 EUROPEAN CONFERENCE ON CIRCUIT THEORY AND DESIGN, VOL 1 | 2005年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A compact model for a cantilever beam microclectromechanical (MEM) contact switch is constructed. The beam deflection is modelled by discretising the beam along its length. The distributed capacitance, electrostatic force and squeezed-film fluid force are also calculated at the same discrete points. The electromechanical contact tip is modelled as a lumped contact force and conductance. The model is implemented with a nonlinear equivalent circuit utilising the components in the MEMS module of the circuit simulation and design tool Aplac. This enables nonlinear time and frequency domain simulations. This paper presents transient on/off characteristics simulations, and analyses and compares the S-parameters at the on- and off- positions.
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页码：47 / 50
页数：4
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