Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

被引：5
|
作者：
Yuan, D. Q. [1 ]
Wu, Q. R. [1 ]
Xu, J. T. [1 ]
Zhou, M. [2 ]
Yang, H. F. [3 ]
机构：
[1] Huai Hai Inst Technol, Dept Math & Phys, Lianyungang 222005, Jiangsu, Peoples R China
[2] Tsinghua Univ, Dept Mech Engn, Beijing 100084, Peoples R China
[3] China Univ Min & Technol, Coll Mech & Elect Engn, Xuzhou 221116, Peoples R China
来源：
JOURNAL OF OPTICAL TECHNOLOGY | 2015年 / 82卷 / 06期
基金：
中国国家自然科学基金;
关键词：
METALS;
D O I：
10.1364/JOT.82.000353
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A regular micro-apparatus covered with periodic nanohole, nanoridge, and ripple structures on silicon bulk (with crystal orientation of 110) was formed by micromachining with a tightly focused beam of a femtosecond laser with a wavelength of 800 nm, a repetition rate of 1 kHz, and a pulse length of 130 fs in air. We used laser direct writing technology to form periodic double-row nanohole structures, and the laser was focused with a 10x focusing objective lens (NA = 0.3). We investigated the relationship between the width of structures and the speed of processing to provide knowledge of the evolution of the nanohole and nanoridge structures. (C) 2015 Optical Society of America.
引用
收藏
页码：353 / 356
页数：4
相关论文
共 50 条
  • [41] Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon
    付强
    钱静
    王关德
    赵全忠
    Chinese Optics Letters, 2023, 21 (05) : 52 - 56
  • [42] Role of nanoparticles generation in the formation of femtosecond laser-induced periodic surface structures on silicon
    Xue, Hongyan
    Deng, Guoliang
    Feng, Guoying
    Chen, Lin
    Li, Jiaqi
    Yang, Chao
    Zhou, Shouhuan
    OPTICS LETTERS, 2017, 42 (17) : 3315 - 3318
  • [43] Laser-induced periodic surface structure in silicon wafer irradiated by continuous laser
    Zhang, X.
    Lu, J.
    Zhang, H. C.
    Li, Z. W.
    Wu, W. Y.
    Gong, Y. C.
    Yang, Y. T.
    FIFTH INTERNATIONAL SYMPOSIUM ON LASER INTERACTION WITH MATTER, 2019, 11046
  • [44] Rapid fabrication of cylindrical microlens array by shaped femtosecond laser direct writing
    Luo, Zhi
    Wang, Cong
    Yin, Kai
    Dong, Xinran
    Chu, Dongkai
    Duan, Ji'an
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2016, 122 (07):
  • [45] Rapid fabrication of cylindrical microlens array by shaped femtosecond laser direct writing
    Zhi Luo
    Cong Wang
    Kai Yin
    Xinran Dong
    Dongkai Chu
    Ji’an Duan
    Applied Physics A, 2016, 122
  • [46] Periodic Surface Structure Creation by UV Femtosecond Pulses on Silicon
    Gilicze, Barnabas
    Moczok, Mario
    Madarasz, Daniel
    Juhasz, Nora
    Racsko, Bence
    Nanai, Laszlo
    TIM15-16 PHYSICS CONFERENCE, 2017, 1796
  • [47] Direct laser writing of amorphous silicon on Si-substrate induced by high repetition femtosecond pulses
    Kiani, Amirkianoosh
    Venkatakrishnan, Krishnan
    Tan, Bo
    JOURNAL OF APPLIED PHYSICS, 2010, 108 (07)
  • [48] Femtosecond laser induced periodic surface structure on poly-L-lactic acid
    Yada, Shuhei
    Terakawa, Mitsuhiro
    OPTICS EXPRESS, 2015, 23 (05): : 5694 - 5703
  • [49] Controlling the morphologies of femtosecond laser-induced periodic surface structure on silicon by combining deep learning with energy deposition model
    Ye, Manlou
    Sun, Jingya
    Chen, Zhicheng
    Tao, Wenpan
    Lian, Yiling
    Yang, Zhuangge
    MATERIALS & DESIGN, 2024, 242
  • [50] Positive and negative nanohole-fabrication on glass surface by femtosecond laser with template of polystyrene particle array
    Sakai, Tetsuo
    Nedyalkov, Nikolay
    Obara, Minoru
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (07) : 2102 - 2107
12345