Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

被引：5
|
作者：
Yuan, D. Q. [1 ]
Wu, Q. R. [1 ]
Xu, J. T. [1 ]
Zhou, M. [2 ]
Yang, H. F. [3 ]
机构：
[1] Huai Hai Inst Technol, Dept Math & Phys, Lianyungang 222005, Jiangsu, Peoples R China
[2] Tsinghua Univ, Dept Mech Engn, Beijing 100084, Peoples R China
[3] China Univ Min & Technol, Coll Mech & Elect Engn, Xuzhou 221116, Peoples R China
来源：
JOURNAL OF OPTICAL TECHNOLOGY | 2015年 / 82卷 / 06期
基金：
中国国家自然科学基金;
关键词：
METALS;
D O I：
10.1364/JOT.82.000353
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A regular micro-apparatus covered with periodic nanohole, nanoridge, and ripple structures on silicon bulk (with crystal orientation of 110) was formed by micromachining with a tightly focused beam of a femtosecond laser with a wavelength of 800 nm, a repetition rate of 1 kHz, and a pulse length of 130 fs in air. We used laser direct writing technology to form periodic double-row nanohole structures, and the laser was focused with a 10x focusing objective lens (NA = 0.3). We investigated the relationship between the width of structures and the speed of processing to provide knowledge of the evolution of the nanohole and nanoridge structures. (C) 2015 Optical Society of America.
引用
收藏
页码：353 / 356
页数：4
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