Interposer based on Metallic-nanowire-Membrane (MnM) for mm-Wave Applications

被引：0
|
作者：
Pelegrini, M. V. [1 ]
Pinheiro, J. M. [1 ]
Gomes, L. G. [1 ]
Rehder, G. P. [1 ]
Serrano, A. L. C. [1 ]
Podevin, F. [2 ]
Ferrari, P. [2 ]
机构：
[1] Univ Sao Paulo, Lab Microelect, Sao Paulo, Brazil
[2] Univ Grenoble Alpes, IMEP LAHC, F-38000 Grenoble, France
来源：
2016 46TH EUROPEAN MICROWAVE CONFERENCE (EUMC) | 2016年
基金：
巴西圣保罗研究基金会;
关键词：
millimeter wave technology; through-silicon vias; nanowires; three-dimensional integrated circuits;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, an innovative mm-wave technology platform is presented based on the metallic-nanowire-membrane (MnM). Here, the interposer with the most basic components are demonstrated: high performance TSVs and transmission lines showing a wide range of Zc. It was shown that it is possible to fabricate transmission lines with low and high characteristic impedances, varying from 5 Omega to 140 Omega Highly miniaturized transmission lines can also he obtained with high quality factor (greater than 30). TSVs were fabricated with small footprint (30 mu m x 20 mu m) and low losses (0.05 dB/transition). These preliminary results show the promising potential of the MnM platform for the development of mm-wave devices that could include filters, couplers, feeding networks and antenna arrays.
引用
收藏
页码：1461 / 1464
页数：4
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