Interposer based on Metallic-nanowire-Membrane (MnM) for mm-Wave Applications

In this paper, an innovative mm-wave technology platform is presented based on the metallic-nanowire-membrane (MnM). Here, the interposer with the most basic components are demonstrated: high performance TSVs and transmission lines showing a wide range of Zc. It was shown that it is possible to fabricate transmission lines with low and high characteristic impedances, varying from 5 Omega to 140 Omega Highly miniaturized transmission lines can also he obtained with high quality factor (greater than 30). TSVs were fabricated with small footprint (30 mu m x 20 mu m) and low losses (0.05 dB/transition). These preliminary results show the promising potential of the MnM platform for the development of mm-wave devices that could include filters, couplers, feeding networks and antenna arrays.