Interposer based on Metallic-nanowire-Membrane (MnM) for mm-Wave Applications

被引：0

作者：

Pelegrini, M. V. ^{[1
]}

Pinheiro, J. M. ^{[1
]}

Gomes, L. G. ^{[1
]}

Rehder, G. P. ^{[1
]}

Serrano, A. L. C. ^{[1
]}

Podevin, F. ^{[2
]}

Ferrari, P. ^{[2
]}

机构：

[1] Univ Sao Paulo, Lab Microelect, Sao Paulo, Brazil

[2] Univ Grenoble Alpes, IMEP LAHC, F-38000 Grenoble, France

来源：

2016 46TH EUROPEAN MICROWAVE CONFERENCE (EUMC) | 2016年

基金：

巴西圣保罗研究基金会;

关键词：

millimeter wave technology; through-silicon vias; nanowires; three-dimensional integrated circuits;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, an innovative mm-wave technology platform is presented based on the metallic-nanowire-membrane (MnM). Here, the interposer with the most basic components are demonstrated: high performance TSVs and transmission lines showing a wide range of Zc. It was shown that it is possible to fabricate transmission lines with low and high characteristic impedances, varying from 5 Omega to 140 Omega Highly miniaturized transmission lines can also he obtained with high quality factor (greater than 30). TSVs were fabricated with small footprint (30 mu m x 20 mu m) and low losses (0.05 dB/transition). These preliminary results show the promising potential of the MnM platform for the development of mm-wave devices that could include filters, couplers, feeding networks and antenna arrays.

引用

页码：1461 / 1464

页数：4

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