共 50 条
- [21] Materials science issues of plasma source ion implantation ION-SOLID INTERACTIONS FOR MATERIALS MODIFICATION AND PROCESSING, 1996, 396 : 455 - 466
- [22] Cost model for commercial plasma source ion implantation SURFACE & COATINGS TECHNOLOGY, 1998, 102 (1-2): : 8 - 18
- [23] Boron doping of silicon by plasma source ion implantation SURFACE & COATINGS TECHNOLOGY, 1997, 93 (2-3): : 247 - 253
- [25] Key issues in plasma-source ion implantation SURFACE & COATINGS TECHNOLOGY, 1997, 96 (01): : 45 - 51
- [26] Polymer surface modification by plasma source ion implantation Surface and Coatings Technology, 1997, 93 (2-3): : 261 - 264
- [27] Utilization of plasma source ion implantation for tribological applications SURFACE & COATINGS TECHNOLOGY, 1997, 96 (01): : 16 - 21
- [28] Polymer surface modification by plasma source ion implantation SURFACE & COATINGS TECHNOLOGY, 1997, 93 (2-3): : 261 - 264
- [29] A metal plasma source ion implantation and deposition system REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (03): : 1816 - 1820