Buried-type benzocyclobutene optical waveguides fabricated by the illumination of ultraviolet laser shots are presented. Experimental results show multimode interference power splitters can be fabricated with high accuracy, short time, and good controllability.
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Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
Tsinghua Univ, Dept Elect Engn, Beijing 100084, Peoples R ChinaChinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
Li Ma
Zhu Hongliang
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Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
Zhu Hongliang
Chen Minghua
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Tsinghua Univ, Dept Elect Engn, Beijing 100084, Peoples R ChinaChinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Wei, HZ
Yu, JZ
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机构:Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Yu, JZ
Liu, ZL
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机构:Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Liu, ZL
Zhang, XF
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机构:Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Zhang, XF
Shi, W
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机构:Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Shi, W
Fang, CS
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机构:Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
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Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Note, Y
Itoh, K
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Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
机构:
Key Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics,Chinese Academy of SciencesKey Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics,Chinese Academy of Sciences
贾锐
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刘焕明
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汤益丹
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杨成樾
薛春来
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Institute of Semiconductors,Chinese Academy of SciencesKey Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics,Chinese Academy of Sciences
薛春来
刘新宇
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Key Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics,Chinese Academy of SciencesKey Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics,Chinese Academy of Sciences