Fabrication of Benzocyclobutene Multimode Interference Power Splitters

被引:0
|
作者
Chang, Yu-Shuan [1 ]
Wang, Way-Seen [2 ]
机构
[1] Natl Taiwan Univ, Grad Inst Photon & Optoelect, Taipei 10617, Taiwan
[2] Natl Taiwan Univ, Dept Elect Engn, Taipei 10617, Taiwan
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Buried-type benzocyclobutene optical waveguides fabricated by the illumination of ultraviolet laser shots are presented. Experimental results show multimode interference power splitters can be fabricated with high accuracy, short time, and good controllability.
引用
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页码:171 / +
页数:2
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