A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry

被引：36
|
作者：
Peggs, GN [1 ]
Yacoot, A [1 ]
机构：
[1] Natl Phys Lab, Ctr Basic Thermal & Length Metrol, Teddington TW11 0LW, Middx, England
来源：
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 2002年 / 360卷 / 1794期
关键词：
optical interferometry; X-ray interferometry; nanometrology;
D O I：
10.1098/rsta.2001.0976
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
This paper reviews recent work in the field of displacement measurement using optical and X-ray interferometry at the sub-nanometre level of accuracy. The major sources of uncertainty in optical interferometry are discussed and a selection of recent designs of ultra-precise, optical-interferometer-based, displacement measuring transducers presented. The use of X-ray interferometry and its combination with optical interferometry is discussed.
引用
收藏
页码：953 / 968
页数：16
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