A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry

被引：36

作者：

Peggs, GN ^{[1
]}

Yacoot, A ^{[1
]}

机构：

[1] Natl Phys Lab, Ctr Basic Thermal & Length Metrol, Teddington TW11 0LW, Middx, England

来源：

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 2002年 / 360卷 / 1794期

关键词：

optical interferometry; X-ray interferometry; nanometrology;

D O I：

10.1098/rsta.2001.0976

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

This paper reviews recent work in the field of displacement measurement using optical and X-ray interferometry at the sub-nanometre level of accuracy. The major sources of uncertainty in optical interferometry are discussed and a selection of recent designs of ultra-precise, optical-interferometer-based, displacement measuring transducers presented. The use of X-ray interferometry and its combination with optical interferometry is discussed.

引用

页码：953 / 968

页数：16

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