A novel approach to characterization of progressive breakdown in high-k/metal gate stacks

被引：34
|
作者：
Pagano, R. [1 ]
Lombardo, S. [1 ]
Palumbo, F. [2 ]
Kirsch, P. [3 ,4 ]
Krishnan, S. A. [3 ,4 ]
Young, C. [3 ]
Choi, R. [3 ]
Bersuker, G. [3 ]
Stathis, J. H. [4 ]
机构：
[1] CNR, IMM, I-95121 Catania, Italy
[2] CNEA, CONICET, Buenos Aires, DF, Argentina
[3] SEMATECH, Austin, TX 78741 USA
[4] IBM Res Div, Yorktown Hts, NY 10598 USA
来源：
MICROELECTRONICS RELIABILITY | 2008年 / 48卷 / 11-12期
关键词：
D O I：
10.1016/j.microrel.2008.07.071
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Dielectric breakdown (BD) of nFETs with TiN metal gates and HfO2/interfacial layer with 1.09 nm EOT is studied. Occurrence of progressive BD at low current levels is demonstrated. A new measurement methodology for extraction of the PBD time and its dependence on gate voltage are reported. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1759 / 1764
页数：6
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