Research and validation of key measurement technologies of large aperture optical elements

A lot of optical components with large aperture are employed in high-power solid-state laser driver. These optical components are with high requirement on the surface shape, optical homogeneity and stress distribution. In order to test these parameters, different types of interferometers, surface profilers and stress meters from different manufacturers are needed. But the problem is the products from different manufacturers may provide different test results. To solve the problem, the research and verification of the key measurement technologies of large aperture optical components are carried out in this paper. The absolute flatness and optical homogeneity measurement methods are analyzed. And the test results of different interferometric software are compared. The test results from different surface profilers and stress meters are also compared. The consistency and reliability of different test software are obtained with the comparing results, which will guide users to select a suitable product.