[1] Tsinghua Univ, Tsinghua Natl Lab Informat Sci & Technol TNList, Inst Microelect, Beijing 100084, Peoples R China
[2] McGill Univ, Montreal, PQ H3A 2T8, Canada
[3] Tsinghua Univ, Key Lab Adv Mfg Mat Proc Technol, Inst Microelect, Beijing 100084, Peoples R China
[4] Tsinghua Univ, Dept Mech Engn, Beijing 100084, Peoples R China
[5] Tsinghua Univ, CNMM, Beijing 100084, Peoples R China