MEMS Deformable Mirror Actuated By Electrostatic Piston Array

被引：0
|
作者：
Uno, Akiko [1 ]
Hirai, Yoshikazu [1 ]
Tsuchiya, Toshiyuki [1 ]
Tabata, Osamu [1 ]
机构：
[1] Kyoto Univ, Dept Micro Engn, Kyoto, Japan
来源：
2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2016年
关键词：
deformable mirror; electrostatic force; piston; low voltage actuation; real-time control; mathematical model;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have proposed a new electrostatically deformable mirror (ES-DM) capable of convex deformation and low-voltage actuation, which have been major issues for conventional ES-DMs. The principle of the device was confirmed by the operation of fabricated device that shows 3-mu m displacement in a tilt deformation at 30 V. Simple mathematical model with high accuracy was constructed for real-time control and device design optimization.
引用
收藏
页数：2
相关论文
共 50 条
  • [41] Hexagon MEMS micromirror actuated by electrostatic repulsive force
    Hu, Fang-Rong
    Wang, Ai-Na
    Qiu, Chuan-Kai
    Yao, Jun
    Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, 2010, 8 (02): : 171 - 176
  • [42] Electrostatic actuated mems for precision AC voltage references
    Bounouh, A.
    Camon, H.
    Ricart, T.
    Pisella, C.
    Ziade, F.
    Polletaeff, A.
    Allal, D.
    Plana, R.
    Leprat, D.
    2008 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS DIGEST, 2008, : 220 - +
  • [43] Design of a MEMS micromirror actuated by electrostatic repulsive force
    Hu, Fangrong
    Tang, Yalu
    Qian, Yixian
    OPTIK, 2012, 123 (05): : 387 - 390
  • [44] MEMS Piston Mirror Arrays for Computer Generated Holography
    Durr, P.
    Neudert, A.
    Nitzsche, M.
    Hohle, C.
    Stolle, H.
    Pleikies, J.
    MOEMS AND MINIATURIZED SYSTEMS XXI, 2022, 12013
  • [45] Concept design of an electrostatic actuated controlled liquid mirror
    Hisakado, Tomu
    Schroeder, Paul
    Vollmer, Devin
    Dautt-Silva, Alicia
    Buczeks, Sean
    Shallcross, Clayton
    Cabell-Kluch, Thomas
    Monton, Carlos
    Saumur, Michelle
    Watson, Alexander
    GROUND-BASED AND AIRBORNE TELESCOPES X, 2024, 13094
  • [46] MEMS Mirror Array with Crosstalk Shielding
    Buswell, Steven
    Lam, Lawrence
    Zhou, Tiansheng
    PROCEEDINGS OF THE FIRST INTERNATIONAL CONFERENCE ON MECHATRONIC SYSTEM AND MEASUREMENT TECHNOLOGY, 2012, : 47 - 50
  • [47] Segmented MEMS deformable-mirror for wavefront correction
    Helmbrecht, Michael A.
    He, Min
    Juneau, Thor
    Hart, Matthew
    Doble, Nathan
    OPTOMECHATRONIC MICRO/NANO DEVICES AND COMPONENTS II, 2006, 6376
  • [48] PERFORMANCE EVALUATION OF AN EDGE-ACTUATED, MODAL, DEFORMABLE MIRROR
    NICHOLS, JS
    DUNEMAN, D
    JASSO, J
    OPTICAL ENGINEERING, 1983, 22 (03) : 366 - 370
  • [49] MEMS DEFORMABLE MIRROR WITH INTEGRATED BLACK SILICON APERTURE
    Liu, Tianbo
    Dickensheets, David L.
    2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014, : 215 - 216
  • [50] Optical efficiency of MEMS deformable mirror for adaptive optics
    Cai, Dongmei
    Yao, Jun
    Jiang, Wenhan
    MEMS ADAPTIVE OPTICS III, 2009, 7209
12345