MEMS Deformable Mirror Actuated By Electrostatic Piston Array

被引：0
|
作者：
Uno, Akiko [1 ]
Hirai, Yoshikazu [1 ]
Tsuchiya, Toshiyuki [1 ]
Tabata, Osamu [1 ]
机构：
[1] Kyoto Univ, Dept Micro Engn, Kyoto, Japan
来源：
2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2016年
关键词：
deformable mirror; electrostatic force; piston; low voltage actuation; real-time control; mathematical model;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have proposed a new electrostatically deformable mirror (ES-DM) capable of convex deformation and low-voltage actuation, which have been major issues for conventional ES-DMs. The principle of the device was confirmed by the operation of fabricated device that shows 3-mu m displacement in a tilt deformation at 30 V. Simple mathematical model with high accuracy was constructed for real-time control and device design optimization.
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页数：2
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