Novel design for a-Si:H TFTs with promising mechanical reliability on flexible substrate

被引:0
|
作者
Chen, Po-Chiu [1 ]
Ho, King-Yuan [1 ]
Lee, Min-Hung [1 ]
Cheng, Chun-Cheng [1 ]
Yeh, Yung-Hui [1 ]
机构
[1] Ind Technol Res Inst, Display Technol Ctr, Hsinchu, Taiwan
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we investigated several kinds of a-Si:H TFTs structures fabricated on polyimide (PI) substrate at 160 degrees C under 1x10(4) Cycles of mechanical bending stress. After mechanical bending stress, the threshold voltage of different a-Si:H TFTs structures have different shift. It is a critical task to optimize suitable design for a-Si:H TFTs on flexible substrate. L-shape design a-Si:H TFTs with better stability after bending stress. It is a good candidate for the SOP or pixel array on flexible substrate.
引用
收藏
页码:723 / 726
页数:4
相关论文
共 50 条
  • [31] Charge emission induced transient leakage currents of a-Si:H and IGZO TFTs on flexible plastic substrates
    Smith, J.
    Couture, A.
    Allee, D.
    ELECTRONICS LETTERS, 2014, 50 (02) : 105 - 106
  • [32] Stress control for overlay registration in a-Si:H TFTs on flexible organic-polymer-foil substrates
    Cheng, IC
    Kattamis, A
    Long, K
    Sturm, JC
    Wagner, S
    JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2005, 13 (07) : 563 - 568
  • [33] Physics of below threshold current distribution in a-Si:H TFTs
    Slade, HC
    Shur, MS
    Deane, SC
    Hack, M
    FLAT PANEL DISPLAY MATERIALS II, 1997, 424 : 91 - 96
  • [34] Planarization technology of a-Si:H TFTs for AM-LCDs
    Lan, JH
    Kanicki, J
    DISPLAY TECHNOLOGIES II, 1998, 3421 : 170 - 182
  • [35] Static characteristics of a-Si:H dual-gate TFTs
    Servati, P
    Karim, KS
    Nathan, A
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (04) : 926 - 932
  • [36] Physics of below threshold current distribution in a-Si:H TFTs
    Slade, HC
    Shur, MS
    Deane, SC
    Hack, M
    AMORPHOUS SILICON TECHNOLOGY - 1996, 1996, 420 : 257 - 262
  • [37] High-rate a-Si:H for TFTs: A comparative study
    Meiling, H
    vanderWeg, WF
    Schropp, REI
    Holleman, J
    PROCEEDINGS OF THE THIRD SYMPOSIUM ON THIN FILM TRANSISTOR TECHNOLOGIES, 1997, 96 (23): : 146 - 157
  • [38] Threshold voltage performance of a-Si:H TFTs for analog applications
    Karim, KS
    Sakariya, K
    Nathan, A
    AMORPHOUS AND NANOCRYSTALLINE SILICON-BASED FILMS-2003, 2003, 762 : 247 - 252
  • [39] Back channel etch chemistry of advanced a-Si:H TFTs
    Kuo, A.
    Won, T. K.
    Kanicki, J.
    MICROELECTRONIC ENGINEERING, 2011, 88 (03) : 207 - 212
  • [40] Accelerated stress testing of a-Si:H TFTs for AMOLED displays
    Sakariya, K
    Ng, CKM
    Huang, IH
    Sultana, A
    Tao, S
    Nathan, A
    AMORPHOUS AND NANOCRYSTALLINE SILICON SCIENCE AND TECHNOLOGY- 2004, 2004, 808 : 661 - 666