Statistical analysis and design of semiconductor manufacturing systems

被引：0
|
作者：
Chen, A [1 ]
Guo, RS [1 ]
Lin, P [1 ]
机构：
[1] Natl Taiwan Univ, Grad Inst Ind Engn, Taipei 106, Taiwan
来源：
ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS | 2000年
关键词：
manufacturing control; robust design; statistical process control;
D O I：
10.1109/ISSM.2000.993681
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The enormous complexity of a semiconductor manufacturing system is the main obstacle for making quality manufacturing control decisions. Conventional methodologies, such as queueing network and simulation analysis, are often too complex to be used effectively. In this paper, we will demonstrate a methodology to build simple statistical models that faithfully characterize the manufacturing system. We then show how these models can help improve the quality of manufacturing control decisions.
引用
收藏
页码：335 / 338
页数：4
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